Mr. Yutaro Iwashige Profile

Yutaro Iwashige

at The Institute of Scientific and Industrial Research

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Author

Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Dissolution dynamics of copolymer of poly(4-hydroxystyrene-co-methacrylic acid) in tetraalkylammonium hydroxide aqueous solutions

Yutaro Iwashige, Yuko Tsutsui Ito, Takahiro Kozawa, Kazuo Sakamoto, Makoto Muramatsu

Proceedings Volume 12957, 129570D (2024) https://doi.org/10.1117/12.3011199

KEYWORDS: Copolymers, Stochastic processes, Lithography, Line width roughness, Semiconductors, Photoresist processing, Materials processing, Extreme ultraviolet lithography, Polymers

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Proceedings Article | 1 May 2023 Presentation + Paper

Effects of photoacid generator decomposition on dissolution kinetics of poly(4-hydroxystyrene) in tetraalkylammonium hydroxide aqueous solutions

Yutaro Iwashige, Yuko Tsutsui Ito, Takahiro Kozawa, Kazuo Sakamoto, Makoto Muramatsu

Proceedings Volume 12498, 124980I (2023) https://doi.org/10.1117/12.2658138

KEYWORDS: Ultraviolet radiation, Photoacid generators, Stochastic processes, Line width roughness, Semiconductors, Photoresist processing, Materials processing, Lithography

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