Dr. Zhenzhen Kong Profile

Dr. Zhenzhen Kong

at Institute of Microelectronics of the CAS

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Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Study of selective dry etching Si0.7Ge0.3 with different plasma source in process of gate-all-around FET

Enxu Liu, Chaoran Yang, Junjie Li, Na Zhou, Longrui Xia, Rui Chen, Hua Shao, Jianfeng Gao, Zhenzhen Kong, Chenchen Zhang, Panpan Lai, Tao Yang, Yayi Wei, Junfeng Li, Jun Luo, Wenwu Wang

Proceedings Volume 12958, 129580F (2024) https://doi.org/10.1117/12.3010332

KEYWORDS: Etching, Plasma, Silicon, Dry etching, Field effect transistors, Gallium arsenide, Transistors, Particles, Resistance, Reflection

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Proceedings Article | 1 May 2023 Poster + Paper

Study of selective isotropic etching effects of Si1-xGex in gate-all-around nanosheet transistor process

Qi Yan, Hua Shao, Junjie Li, Zhenzhen Kong, Xiaobin He, Junfeng Li, Tao Yang, Rui Chen, Yayi Wei

Proceedings Volume 12499, 124990K (2023) https://doi.org/10.1117/12.2658312

KEYWORDS: Etching, Silicon, Monte Carlo methods, Germanium, Isotropic etching, Nanosheets, Transistors, Gallium arsenide, Anisotropic etching, Particles

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