Dr. Alexander Epple Profile

Dr. Alexander Epple

at Carl Zeiss SMT GmbH

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 17 December 2014 Paper

Free form surfaces in imaging optics

Alexander Epple

Proceedings Volume 9293, 92930S (2014) https://doi.org/10.1117/12.2073989

KEYWORDS: Monochromatic aberrations, Mirrors, Zernike polynomials, Optical design, Spherical lenses, Imaging systems, Optical components, Aspheric lenses, Wavefronts, Optics manufacturing

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Proceedings Article | 19 July 2006 Paper

Use of diffractive lenses in lithographic projection lenses

H.-J. Rostalski, A. Epple, H. Feldmann

Proceedings Volume 6342, 63421S (2006) https://doi.org/10.1117/12.692314

KEYWORDS: Lenses, Lithography, Diffractive optical elements, Lens design, Colorimetry, Combined lens-mirror systems, Chromatic aberrations, Calcium, Mirrors, Optical design

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Proceedings Article | 18 July 2006 Paper

Extreme ring fields in microlithography

Alexander Epple

Proceedings Volume 6342, 63421R (2006) https://doi.org/10.1117/12.692313

KEYWORDS: Mirrors, Combined lens-mirror systems, Vignetting, Refractor telescopes, Optical design, Reticles, Relays, Optical lithography, Semiconducting wafers, Lithography

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Proceedings Article | 15 October 2005 Paper

Use of diffractive optical elements in lithographic projection lenses

H.-J. Rostalski, A. Epple, H. Feldmann

Proceedings Volume 5962, 59621A (2005) https://doi.org/10.1117/12.625192

KEYWORDS: Lenses, Diffractive optical elements, Lithography, Lens design, Colorimetry, Combined lens-mirror systems, Chromatic aberrations, Calcium, Mirrors, Glasses

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Proceedings Article | 15 October 2005 Paper

Catadioptric projection lenses for immersion lithography

Heiko Feldmann, Aurelian Dodoc, Alexander Epple, Hans-Jürgen Rostalski, David Shafer, Wilhelm Ulrich

Proceedings Volume 5962, 59620Y (2005) https://doi.org/10.1117/12.625199

KEYWORDS: Mirrors, Combined lens-mirror systems, Lenses, Lithography, Refractor telescopes, Immersion lithography, Optical design, Monochromatic aberrations, Beam splitters, Relays

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Conference Committee Involvement (3)

International Optical Design Conference 2021

27 June 2021 | Online Only, United States

Novel Optical Systems Design and Optimization XI

13 August 2008 | San Diego, California, United States

Novel Optical Systems Design and Optimization X

28 August 2007 | San Diego, California, United States

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