Dr. Bhavishya Chowrira Poovanna Profile

Dr. Bhavishya Chowrira Poovanna

at imec

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Publications (2)

Proceedings Article | 12 November 2024 Presentation + Paper

Logic and memory patterning breakthrough using High-NA lithography

V. Blanco Carballo, S. Roy, B. Chowrira, T. Pham, J. Wouters, S. Das, S. Decoster, P. Leray, R. Liu, K. Ronse, G. Vandenberghe, A. Niroomand, P. Foubert, V. Rutigliani, H. Suh, M. Gupta, D. de Simone, M. Dusa, C. Beral, V. Philipsen, V. Wiaux, J. Franke, J. Bekaert, B. Baskaran, W. Gillijns, R. Kim, Y. Sherazi, H. Vats, M. Cupak, C. Chang, Y.-J. Lin, J. Lee, S. Hwang, K. Yang, K. Miyaguchi

Proceedings Volume 13216, 1321604 (2024) https://doi.org/10.1117/12.3047176

KEYWORDS: Metals, Optical lithography, Logic, Semiconducting wafers, Extreme ultraviolet lithography, Etching, Scanning electron microscopy, Lithography, Tin

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Proceedings Article | 10 April 2024 Poster + Paper

Defect inspection methodology for contact holes

D. Van den Heuvel, C. Beral, B. Chowrira, P. Foubert, D. De Simone, G. Lorusso, M. Beggiato, S. Das, A. Charley, M. Sugie, N. Ban, H. Koike, M. Isawa, W. Sun

Proceedings Volume 12955, 129553S (2024) https://doi.org/10.1117/12.3015844

KEYWORDS: Semiconducting wafers, Inspection, Extreme ultraviolet, Metrology, Light sources and illumination, Stochastic processes, Etching, Defect inspection, Transmission electron microscopy

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