Dr. Biqiu Liu Profile

Dr. Biqiu Liu

at Shanghai Huali Integrated Circuit Corp

SPIE Involvement:

Author

Publications (10)

Proceedings Article | 10 December 2024 Paper

Edge placement error analysis through backscattered electron imaging

Yuyang Bian, Na Li, Wenzhan Zhou, Biqiu Liu, Yu Zhang, Rong Huang, Jiawang Song, Qiang Zhou, Siqun Xiao, Or Zruya, Lee Rubinstein, Aner Avakrat, Jovian Delaforce, Antoine Legrain, Qing Ye, Frederic Roberten, Amir Rosen, Michael Shifrin

Proceedings Volume 13423, 134230C (2024) https://doi.org/10.1117/12.3052520

KEYWORDS: Optical lithography, Statistical analysis, Semiconductor manufacturing, Process control, Scanning electron microscopy, Line width roughness

Read Abstract +

Proceedings Article | 10 December 2024 Paper

SONR-based gauge down sampling for OPC modeling

Haibin Yu, Biqiu Liu, Shirui Yu, Jishuo Yang, Xinyi Hu

Proceedings Volume 13423, 134231J (2024) https://doi.org/10.1117/12.3054862

KEYWORDS: Optical proximity correction, Modeling, Lithography, Mathematical modeling, Statistical modeling

Read Abstract +

Proceedings Article | 10 December 2024 Paper

Optical critical dimension accuracy improvement through TEM uncertainty reduction

Lin Du, Kailin Ren, Yang Xu, Wenzhan Zhou, Biqiu Liu, Yu Zhang, Yuyang Bian

Proceedings Volume 13423, 1342313 (2024) https://doi.org/10.1117/12.3053021

KEYWORDS: Transmission electron microscopy, Measurement uncertainty, Semiconductor manufacturing

Read Abstract +

SPIE Journal Paper | 4 November 2022

Process window improvement for fin cut layer in self-aligned double-patterning process based on backscattered electron imaging

Yu Zhang, David Wei Zhang, Yuyang Bian, Biqiu Liu, Cong Zhang, Jun Huang, Jiawang Song, Yang Gao, Qiang Zhou, Wei Chen, Siqun Xiao, Shmuel Ben Nissim, Kevin Houchens, Omri Baum, Amit Zakay, Tal Ayzik, Yaniv Abramovitz

JM3, Vol. 21, Issue 04, 041605, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041605

KEYWORDS: Etching, System on a chip, Image processing, Sensors, Lithography, Semiconducting wafers, Distance measurement, Process control, Transistors, Signal to noise ratio

Read Abstract +

SPIE Journal Paper | 19 September 2022

Bottom grating asymmetry-induced inaccuracy in diffraction-based overlay measurement

Yu Zhang, David Wei Zhang, Yuyang Bian, Biqiu Liu, Cong Zhang, Jun Huang

JM3, Vol. 21, Issue 03, 034001, (September 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.3.034001

KEYWORDS: Polarization, Diffraction gratings, Diffraction, Scanning electron microscopy, Overlay metrology, Etching, Metrology, Optical testing, Lithography, Image processing

Read Abstract +

Proceedings Article | 13 June 2022 Presentation

A holistic study of edge placement error on fin cut layer in self-aligned double patterning process

Yuyang Bian, Biqiu Liu, Xijun Guan, Xiaobo Guo, Cong Zhang, Wenzhan Zhou, Jun Huang, Yu Zhang, Jiawang Song, Yang Gao, Shmuel Nissim, Kevin Houchens, Omri Baum, Qiang Zhou, Zaisan Yang, Amit Zakay, Tal Ayzik, Yaniv Abramovitz

Proceedings Volume PC12053, PC120530D (2022) https://doi.org/10.1117/12.2614221

KEYWORDS: Overlay metrology, Double patterning technology, Edge roughness, Scanning electron microscopy, Manufacturing, Line width roughness, Line edge roughness, Integrated circuits, Electron microscopy, Critical dimension metrology

Read Abstract +

Proceedings Article | 19 August 2021 Presentation + Paper

The importance of in-die sampling using E-beam solution on yield improvement

Yu Zhang, Biqiu Liu, Cong Zhang, Yuyang Bian, Song Gao, Yifei Zhu, Xiaobo Guo, Jun Huang, Yaniv Abramovitz, Qiang Zhou, Uri Smolyan, Omri Baum, Shmuel Ben Nissim, Alexander Vipolzov

Proceedings Volume 11611, 116111X (2021) https://doi.org/10.1117/12.2585391

KEYWORDS: Overlay metrology, Instrument modeling, Semiconducting wafers, Measurement devices, Wafer-level optics, Mathematical modeling, Yield improvement, Etching, Optical testing, Data modeling

Read Abstract +

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Lithography PR profile improvement and defects reduction by film pre-treatment

Jiantao Wang, Song Gao, Shuo Liu, Biqiu Liu, Xiaobo Guo, Cong Zhang, Jun Huang, Yu Zhang

Proceedings Volume 11611, 1161134 (2021) https://doi.org/10.1117/12.2583833

KEYWORDS: Lithography, Reflectivity, Scanning electron microscopy, Silicon, Photoresist materials, Line width roughness, Semiconducting wafers, Etching, Coating

Read Abstract +