Dr. Dmitriy V. Likhachev Profile

Dr. Dmitriy V. Likhachev

Senior Research Scientist at Tokyo Electron America Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 24 March 2009 Paper

Integrated ODP metrology with floating n&k's for lithography process

Patrick Kearney, Dmitriy Likhachev, Junichi Uchida, Göran Fleischer

Proceedings Volume 7272, 727241 (2009) https://doi.org/10.1117/12.814246

KEYWORDS: Scatterometry, Metrology, Semiconducting wafers, Data modeling, Critical dimension metrology, Scanning electron microscopy, Optical properties, Scatter measurement, Cadmium, Lithography

Read Abstract +

Proceedings Article | 25 March 2008 Paper

Low-k n&k variation impact on CD accuracy of scatterometry

Yan Chen, Masahiro Yamamoto, Dmitriy Likhachev, Gang He, Akihiro Sonoda, Vi Vuong

Proceedings Volume 6922, 69223R (2008) https://doi.org/10.1117/12.773133

KEYWORDS: Scatterometry, Critical dimension metrology, Dielectrics, Semiconducting wafers, Refractive index, Optical properties, Scatter measurement, Data modeling, Semiconductor manufacturing, Process modeling

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years