Dr. Erin L. Jablonski Profile

Dr. Erin L. Jablonski

at National Institute of Standards and Technology

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Author

Publications (3)

Proceedings Article | 14 May 2004 Paper

Fundamentals of developer-resist interactions for line-edge roughness and critical dimension control in model 248-nm and 157-nm photoresists

Vivek Prabhu, Michael Wang, Erin Jablonski, Bryan Vogt, Eric Lin, Wen-Li Wu, Dario Goldfarb, Marie Angelopoulos, Hiroshi Ito

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.535862

KEYWORDS: Reflectivity, Photoresist developing, Surface roughness, Atomic force microscopy, Polymers, Photoresist materials, Scattering, Critical dimension metrology, Semiconducting wafers, X-rays

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Proceedings Article | 14 May 2004 Paper

Surface and bulk chemistry of chemically amplified photoresists: segregation in thin films and environmental stability issues

Erin Jablonski, Vivek Prabhu, Sharadha Sambasivan, Daniel Fischer, Eric Lin, Dario Goldfarb, Marie Angelopoulos, Hiroshi Ito

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.535703

KEYWORDS: Photoresist materials, Ultraviolet radiation, Chemistry, Polymers, Protactinium, Carbon, Thin films, Sensors, Polymer thin films, Semiconducting wafers

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Proceedings Article | 26 June 2003 Paper

BARC-resist interfacial interacations

Chelladurai Devadoss, Yubao Wang, Rama Puligadda, Joseph Lenhart, Erin Jablonski, Daniel Fischer, Sharadha Sambasivan, Eric Lin, Wen-li Wu

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485347

KEYWORDS: Polymers, Carbon, Chemistry, X-rays, Sensors, Molecules, Chlorine, Thin films, Liquids, Silicon

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