Dr. Hui Peng
at Univ of Queensland
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 124980U (2023) https://doi.org/10.1117/12.2655986
KEYWORDS: Polymers, Polymethylmethacrylate, Spectroscopy, Molecular interactions, Molecules, FT-IR spectroscopy, Atomic layer deposition, Vacuum, Silicon, Semiconducting wafers

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11612, 116120Q (2021) https://doi.org/10.1117/12.2586516
KEYWORDS: Nanostructures, Photomasks, Nanolithography, Control systems, Ultraviolet radiation, Thin films, Nanodomains, Interfaces, Fabrication, Electron beams

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