Dr. Kevin Anglin Profile

Dr. Kevin Anglin

at Applied Materials Inc

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation

Presentation

Advancing EUV patterning through pattern shaping at Intel 18A process technology node

Robert Browning, Shurong Liang, Peter Sun, Laxmy Menon, Nadjoua Moumen, Can Guven, Nathan Strutt, Mehmet Aykol, Robert Bigwood, Sarah Williams, Kevin Anglin, Amol Gupta, Steven Sherman, Kevin Fischer, Charles Wallace, Gang Shu, Bhavin Shah, Brad Taylor

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3010982

KEYWORDS: Extreme ultraviolet, Advanced patterning, Optical lithography, Printing, Stochastic processes, Semiconducting wafers, Lithography, Design rules

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Proceedings Article | 10 April 2024 Presentation

Presentation

Pattern shaping optimization and applications

Yung-Chen Lin, Huaxiang Li, Kevin Anglin, Steven Sherman

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3010957

KEYWORDS: Extreme ultraviolet, Optical lithography, Etching, Design and modelling, Atomic layer deposition, Advanced patterning

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Proceedings Article | 13 June 2022 Presentation

Presentation

Pattern shape engineering

Shurong Liang, Amol Gupta, Steven Sherman, Kevin Anglin, Keun Hee Bai, Jong Chul Park

Proceedings Volume PC12056, PC1205602 (2022) https://doi.org/10.1117/12.2615043

KEYWORDS: Optical lithography, Extreme ultraviolet lithography, Stochastic processes, Chemistry

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