Dr. Pei-Shiang Chen Profile

Dr. Pei-Shiang Chen

Team Member at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (2)

Proceedings Article | 19 March 2015 Paper

Thermal effect induced wafer deformation in high-energy e-beam lithography

P.S. Chen, W.C. Wang, S.J. Lin

Proceedings Volume 9423, 942310 (2015) https://doi.org/10.1117/12.2085100

KEYWORDS: Distortion, Thermal effects, Semiconducting wafers, Silicon carbide, Silicon, Finite element methods, Scattering, Thermal modeling, Electron beam lithography, Scanners

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Proceedings Article | 4 April 2011 Paper

Influence of massively parallel e-beam direct-write pixel size on electron proximity correction

S. J. Lin, P. S. Chen, J. J. Shin, W. C. Wang, Burn Lin

Proceedings Volume 7970, 79700Z (2011) https://doi.org/10.1117/12.869896

KEYWORDS: Raster graphics, Critical dimension metrology, Semiconducting wafers, Data transmission, Electron beam lithography, Tolerancing, Optical fibers, Maskless lithography, Electron beam direct write lithography, Mask making

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