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Rui Jun Zhang
at National Institute of Metrology,China
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Publications (1)
Proceedings Article | 5 November 2015 Paper
Control and measuring system of a two-dimensional scanning nanopositioning stage based on LabVIEW
Proceedings Volume 9795, 979514 (2015) https://doi.org/10.1117/12.2214428
KEYWORDS: Control systems, Control systems design, Signal generators, Data acquisition, Interferometers, LabVIEW, Ceramics, Metrology, Interfaces, Human-machine interfaces
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