Prof. You-Chia Chang
Associate Professor at National Yang Ming Chiao Tung Univ
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 3 October 2023 Presentation + Paper
Proceedings Volume 12653, 126530H (2023) https://doi.org/10.1117/12.2685760
KEYWORDS: Critical dimension metrology, Optical proximity correction, Optical lithography, Nanostructures, Metalenses, Silicon nitride, Reticles

Proceedings Article | 3 October 2022 Poster
Proceedings Volume PC12195, PC1219521 (2022) https://doi.org/10.1117/12.2644847
KEYWORDS: Optical proximity correction, Lithography, Optical lithography, Near infrared, Photoresist materials, Critical dimension metrology, Systems modeling, Semiconductors, Photoresist developing, Photomasks

Proceedings Article | 1 August 2021 Poster
Wei-Ping Liao, Yu-Fan Lin, Hsueh-Li Liu, Shu-De Gong, Peichen Yu, You-Chia Chang, Jia-Min Shieh, Chun-Chi Chen, Wen-Hsien Huang
Proceedings Volume 11804, 1180421 (2021) https://doi.org/10.1117/12.2593408
KEYWORDS: Optical lithography, Optical proximity correction, Lithography, Resolution enhancement technologies, Photomasks, Parallel computing, Critical dimension metrology, Algorithm development, Transistors, Semiconductors

Proceedings Article | 13 May 2019 Presentation + Paper
You-Chia Chang, Steven Miller, Christopher Phare, Min Chul Shin, Moshe Zadka, Samantha Roberts, Brian Stern, Xingchen Ji, Aseema Mohanty, Oscar Jimenez Gordillo, Michal Lipson
Proceedings Volume 10982, 109821A (2019) https://doi.org/10.1117/12.2519803
KEYWORDS: Phased array optics, Beam steering, Directional couplers, Silicon photonics, Waveguides, Phase shifts, Optical switching, Silicon, Microresonators, Solid state electronics

Proceedings Article | 1 October 2015 Presentation
Ludmila Prokopeva, You-Chia Chang, Naresh Emani, Ted Norris, Alexander Kildishev
Proceedings Volume 9546, 95461W (2015) https://doi.org/10.1117/12.2190139
KEYWORDS: Graphene, Nanophotonics, Optical properties, Optical components, Active remote sensing, Eye, Eye models, Instrument modeling, Nanostructuring, Oscillators

Showing 5 of 6 publications
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