Dr. Zongshun Zeng Profile

Dr. Zongshun Zeng

at Shanghai Institute of Optics and Fine Mechanics

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Publications (3)

Proceedings Article | 24 July 2018 Paper

Flexible pupil correction technology for photolithography machine

Siyu Zhu, Zhiyuan Niu, Fang Zhang, Xiaozhe Ma, Zongshun Zeng, Weijie Shi, Aijun Zeng, Huijie Huang

Proceedings Volume 10827, 1082731 (2018) https://doi.org/10.1117/12.2501205

KEYWORDS: Optical lithography, Diffractive optical elements, Device simulation, Lithography, Critical dimension metrology, Optical design, Lithographic illumination, Optoelectronics, Resolution enhancement technologies, Standards development

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Proceedings Article | 24 July 2018 Paper

Angle position monitoring technology of micro-mirror array for freeform illumination module in immersion lithography

Xiaozhe Ma, Fang Zhang, Zongshun Zeng, Siyu Zhu, Aijun Zeng, Huijie Huang

Proceedings Volume 10827, 1082733 (2018) https://doi.org/10.1117/12.2501223

KEYWORDS: Fourier transforms, Micromirrors, Lithographic illumination, Sensors, Error analysis, Immersion lithography, Reticles, Optical lithography, Source mask optimization, Light scattering

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Proceedings Article | 24 July 2018 Paper

An excellent performance optical system for freeform pupil illumination module in immersion photolithography machine

Zongshun Zeng, Zhiyuan Niu, Fang Zhang, Xiaozhe Ma, Siyu Zhu, Weijie Shi, Aijun Zeng, Huijie Huang

Proceedings Volume 10827, 1082732 (2018) https://doi.org/10.1117/12.2501208

KEYWORDS: Optical lithography, Optical design, Fourier transforms, Device simulation, Resolution enhancement technologies, Micromirrors, Homogenization, Source mask optimization, Lens design, Optical simulations

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