Prof. Kazuto Yamauchi Profile

Prof. Kazuto Yamauchi

Professor at Osaka University

SPIE Involvement:

Conference Chair | Conference Program Committee | Author | Editor

Publications (62)

Proceedings Article | 21 August 2024 Poster + Paper

Development of precision Wolter mirrors for future soft x-ray observations of the Sun

Taro Sakao, Sota Kashima, Satoshi Matsuyama, Takato Inoue, Haruhito Iriyama, Shinnosuke Kurimoto, Kazuto Yamauchi, Yoshiki Kohmura, Akira Miyake, Hiroki Nakamori, Shunichiro Matsuzaka, Toshiki Taniguchi, Toshio Nakano, Noriyuki Narukage

Proceedings Volume 13093, 1309353 (2024) https://doi.org/10.1117/12.3019393

KEYWORDS: Mirrors, X-rays, X-ray imaging, Engineering, Scattering, Mirror surfaces, Point spread functions, Sun

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Proceedings Article | 4 October 2023 Presentation

Fabrication and LTP test result for a 460 mm long deformable mirror to reduce “junction effect”

Yoshio Ichii, Takato Inoue, Fumiharu Tramae, Shinsaku Shiroma, Shinya Aono, Xianbo Shi, Jun Qian, Luca Rebuffi, Juniki Sonoyama, Hisataka Takenaka, Satoshi Matsuyama, Lahsen Assoufid, Kazuto Yamauchi

Proceedings Volume PC12695, PC1269501 (2023) https://doi.org/10.1117/12.2680882

KEYWORDS: Deformable mirrors, Fabrication, Ferroelectric materials, X-rays, Vacuum, Silver, Physics, Nanoparticles, Mirror surfaces, Manufacturing

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Proceedings Article | 3 October 2023 Presentation + Paper

X-ray wavefront sensor development at the Advanced Light Source

Kenneth Goldberg, Antoine Wojdyla, Diane Bryant, Xianbo Shi, Luca Rebuffi, Matthew Frith, Matthew Highland, Lahsen Assoufid, Yoshio Ichii, Takato Inoue, Kazuto Yamauchi

Proceedings Volume 12695, 126950B (2023) https://doi.org/10.1117/12.2679136

KEYWORDS: Wavefronts, Wavefront sensors, X-rays, Adaptive mirrors, Reflection gratings, Reflection, Mirrors

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Proceedings Article | 9 June 2023 Presentation + Paper

Fabrication of atomically precise, super smooth, and damage-free x-ray optics

Pho Bui, Masahiko Kanaoka, Makina Yabashi, Tetsuya Ishikawa, Yasuhisa Sano, Kazuto Yamauchi

Proceedings Volume 12581, 1258109 (2023) https://doi.org/10.1117/12.2668438

KEYWORDS: Surface roughness, Optical surfaces, Surface finishing, Mirror surfaces, X-ray optics, Fabrication, Etching, Polishing, Optics manufacturing, X-rays

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An atomically precise, super smooth, and damage-free surface is highly demanded for x-ray mirrors, multilayer optics, channel-cut crystal monochromators (CCM), and gratings. An ultra-precision optic with a figure error of several nm is crucial for single-nanometer spatial resolution, signal strength, and contrast. Moreover, sub-angstrom root-mean-square surface roughness is beneficial for high reflectivity and the lowest unwanted scattering. Additionally, a damage-free surface with no alter layer is greatly desired for CCM and grating substrates because it is essential for the high reflectivity of the CCM and the uniform etching rate of the grating’s ruling. In the manufacturing of x-ray mirrors, to obtain the desired figure error, a non-contact figuring method, such as ion beam figuring (IBF), plasma chemical vaporization machining (PCVM), or Elastic Emission Machining (EEM), is usually employed thanks to its high controllability and stability. EEM has proved the best performance in terms of achieving a low figure error and maintaining a good surface roughness. After shaping/figuring, a finishing method is usually applied to improve its surface roughness without distorting its figure error. Recently, Catalyst-Referred Etching (CARE) has realized its potential and applicability to x-ray mirror manufacturing as a finishing method. Thanks to its removal mechanism, a highly ordered surface with a root-mean-square of 0.03 nm RMS is attained. In the polishing of a CCM, because a mechanical method is usually used to polish its surface at the narrow gap, the residual mechanical damage induced a low reflectivity and low spatial resolution. PCVM with a wire electrode has recently been proposed and demonstrated its excellent performance. The damage-free surface of a CCM with a gap of less than 100µm has been successfully realized by PCVM. In this paper, recent achievements in figuring (EEM), surface finishing (CARE), and damage removal (PCVM) are presented and discussed.

Proceedings Article | 3 October 2022 Presentation

Fabrication for a 400 mm long glue-free deformable mirror (Conference Presentation)

Yoshio Ichii, Hiromi Okada, Shinsaku Shiroma, Shinya Aono, Masahiko Kanaoka, Takato Inoue, Satoshi Matsuyama, Kazuto Yamauchi

Proceedings Volume PC12240, PC122400A (2022) https://doi.org/10.1117/12.2633296

KEYWORDS: Deformable mirrors, Ferroelectric materials, Mirrors, X-rays, Silver, Physics, Nanoparticles, Manufacturing, Lead, Hard x-rays

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Proceedings Article | 6 August 2021 Presentation

Recent progress in precision mirror optics for synchrotron-based x-ray microscopy

Kazuto Yamauchi

Proceedings Volume 11839, 118390K (2021) https://doi.org/10.1117/12.2606066

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Proceedings Article | 1 August 2021 Presentation

Optimization of mirror deformation strategy using mechanical and piezoelectric bending system

Takato Inoue, Yuka Nishioka, Satoshi Matsuyama, Junki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Lahsen Assoufid, Kazuto Yamauchi

Proceedings Volume 11837, 118370B (2021) https://doi.org/10.1117/12.2594944

KEYWORDS: Mirrors, Deformable mirrors, X-rays, Zoom lenses, X-ray optics, Synchrotron radiation, Statistical analysis, Control systems, Beam controllers

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Proceedings Article | 1 August 2021 Presentation

Ultrafine figuring for glue-free deformable mirror

Yoshio Ichii, Hiromi Okada, Shinya Aono, Masahiko Kanaoka, Takato Inoue, Satoshi Matsuyama, Kazuto Yamauchi

Proceedings Volume 11837, 1183708 (2021) https://doi.org/10.1117/12.2594418

KEYWORDS: Deformable mirrors, Ferroelectric materials, X-rays, Silver, Physics, Nanoparticles, Mirrors, Lead, Humidity, Hard x-rays

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Proceedings Article | 1 August 2021 Presentation

Image-based wavefront measurement for full-field x-ray microscopy

Yuto Tanaka, Satoshi Matsuyama, Takato Inoue, Nami Nakamura, Jumpei Yamada, Yoshiki Kohmura, Makina Yabashi, Kazuhiko Omote, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11839, 118390A (2021) https://doi.org/10.1117/12.2595026

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Proceedings Article | 13 December 2020 Presentation

Development of precision Wolter mirrors towards PhoENiX mission for the Sun

Taro Sakao, Satoshi Matsuyama, Jumpei Yamada, Takato Inoue, Kentaro Hata, Hiroyuki Yamaguchi, Taku Hagiwara, Nami Nakamura, Kazuto Yamauchi, Yoshiki Kohmura, Yoshinori Suematsu, Noriyuki Narukage

Proceedings Volume 11444, 114440O (2020) https://doi.org/10.1117/12.2562077

KEYWORDS: Mirrors, Sun, X-ray imaging, X-rays, Particles, Magnetism, Point spread functions, Spectroscopy, Solar processes, Coronagraphy

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Proceedings Article | 22 August 2020 Presentation

Development of x-ray mirrors for XFEL sub-10 nm focusing system based on Wolter type III geometry

Takato Inoue, Jumpei Yamada, Satoshi Matsuyama, Nami Nakamura, Taito Osaka, Hirokatsu Yumoto, Takahisa Koyama, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11491, 114910B (2020) https://doi.org/10.1117/12.2566856

KEYWORDS: Mirrors, X-rays, X-ray lasers, Free electron lasers, Spatial coherence, Nonlinear optics, X-ray optics, Complex systems, Tolerancing, Interferometers

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Proceedings Article | 22 August 2020 Poster + Paper

Prototype design and experimental tests of a zoom mirror system for the APS upgrade

Xianbo Shi, Zhi Qiao, Sheikh Mashrafi, Ross Harder, Deming Shu, Max Wyman, Jayson Anton, Steven Kearney, Luca Rebuffi, Tim Mooney, Jun Qian, Bing Shi, Satoshi Matsuyama, Kazuto Yamauchi, Lahsen Assoufid

Proceedings Volume 11491, 1149110 (2020) https://doi.org/10.1117/12.2569129

KEYWORDS: Mirrors, Wavefronts, Zoom lenses, Electrodes, Prototyping, Sensors, Adaptive optics, Wavefront sensors, Deformable mirrors

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Proceedings Article | 21 August 2020 Presentation

Glue-free bimorph mirror for vacuum chamber use

Yoshio Ichii, Satoshi Matsuyama, Masahiko Kanaoka, Hiromi Okada, Hiroki Nakamori, Takanori Miura, Haruhiko Ohashi, Kazuto Yamauchi

Proceedings Volume 11491, 114910I (2020) https://doi.org/10.1117/12.2570017

KEYWORDS: Mirrors, Ferroelectric materials, Deformable mirrors, Lead, Hard x-rays, X-rays, Silver, Nanoparticles, Actuators, Photovoltaics

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Proceedings Article | 21 August 2020 Presentation

Adaptive x-ray zoom condenser system based on concave and convex mirrors

Yuka Nishioka, Hiroyuki Yamaguchi, Satoshi Matsuyama, Juniki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Lahsen Assoufid, Kazuto Yamauchi

Proceedings Volume 11491, 114910P (2020) https://doi.org/10.1117/12.2568417

KEYWORDS: Mirrors, X-rays, Zoom lenses, X-ray optics, Beam controllers, Beam shaping, Synchrotron radiation, X-ray lasers, Free electron lasers, Control systems

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Proceedings Article | 9 September 2019 Presentation

Development of x-ray adaptive focusing optical system based on the combination of concave mirror and convex mirror (Conference Presentation)

Hiroyuki Yamaguchi, Satoshi Matsuyama, Junki Sonoyama, Kazuki Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11108, 1110805 (2019) https://doi.org/10.1117/12.2528618

KEYWORDS: X-rays, X-ray optics, Deformable mirrors, Mirrors, Beam controllers, Beam shaping, Synchrotron radiation, X-ray lasers, Free electron lasers, Control systems

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Proceedings Article | 9 September 2019 Presentation

Development of high-resolution full-field x-ray microscope based on multilayer advanced Kirkpatrick-Baez mirrors (Conference Presentation)

Satoshi Matsuyama, Jumpei Yamada, Taku Hagiwara, Kazuhiko Omote, Raita Hirose, Yoshihiro Takeda, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11112, 1111207 (2019) https://doi.org/10.1117/12.2528366

KEYWORDS: Stars, Cameras, Objectives, X-ray optics, Spatial resolution, Microscopes, X-rays, Mirrors

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Proceedings Article | 9 September 2019 Presentation

Beam size measurement for XFEL nanobeam using intensity interferometer of x-ray fluorescence (Conference Presentation)

Nami Nakamura, Satoshi Matsuyama, Takato Inoue, Ichiro Inoue, Taito Osaka, Yuichi Inubushi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11109, 111090L (2019) https://doi.org/10.1117/12.2532283

KEYWORDS: X-ray fluorescence spectroscopy, Interferometers, Optical testing, Thin films, Nonlinear optics, X-ray optics, Optical fabrication, Optical alignment, Wavefront sensors, Spatial coherence

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Proceedings Article | 9 September 2019 Presentation

Precision focusing mirror alignment at SACLA using new nanobeam diagnosis (Conference Presentation)

Takato Inoue, Satoshi Matsuyama, Nami Nakamura, Hirokatsu Yumoto, Yuichi Inubushi, Takahisa Koyama, Taito Osaka, Ichiro Inoue, Kensuke Tono, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11108, 1110802 (2019) https://doi.org/10.1117/12.2526972

KEYWORDS: Mirrors, X-rays, Beam shaping, Free electron lasers, Speckle pattern, X-ray lasers, Nanoprobes, Laser development, Diffraction gratings, Interferometers

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Proceedings Article | 18 September 2018 Presentation

Precision Wolter mirrors for future x-ray observations of the Sun (Conference Presentation)

Taro Sakao, Satoshi Matsuyama, Takumi Goto, Jumpei Yamada, Takato Inoue, Kentaro Hata, Hiroyuki Yamaguchi, Kazuto Yamauchi, Yoshiki Kohmura, Ayumi Kime, Yoshinori Suematsu, Noriyuki Narukage, Shin-nosuke Ishikawa

Proceedings Volume 10760, 107600B (2018) https://doi.org/10.1117/12.2320861

KEYWORDS: Mirrors, X-rays, Sun, Scattering, Point spread functions, Solar processes, Coronagraphy, X-ray optics, Plasma, Polishing

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Proceedings Article | 6 September 2017 Paper

Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope

Jumpei Yamada, Satoshi Matsuyama, Shuhei Yasuda, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 10386, 103860C (2017) https://doi.org/10.1117/12.2272904

KEYWORDS: Mirrors, X-rays, X-ray optics, Imaging systems, X-ray imaging, Microscopes, Wavefronts, X-ray microscopy, Chromatic aberrations, Sensors

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Proceedings Article | 23 August 2017 Paper

Development of precision Wolter mirrors for solar x-ray observations

Taro Sakao, Satoshi Matsuyama, Takumi Goto, Jumpei Yamada, Shuhei Yasuda, Kazuto Yamauchi, Yoshiki Kohmura, Ayumi Kime, Akira Miyake, Tadakazu Maezawa, Hirokazu Hashizume, Yoshinori Suematsu, Noriyuki Narukage, Shin-nosuke Ishikawa

Proceedings Volume 10386, 103860E (2017) https://doi.org/10.1117/12.2273507

KEYWORDS: Mirrors, X-rays, X-ray telescopes, Coronagraphy, X-ray imaging, Polishing, X-ray optics, Synchrotrons, X-ray astronomy, Synchrotron x-ray imaging

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High resolution imagery of the Sun's X-ray corona provides an essential clue in understanding dynamics and heating processes of plasma particles there. However, X-ray imagery of the Sun with sub-arcsecond resolution has so far never been conducted due to severe technical difficulty in fabricating precision Wolter mirrors. For future X-ray observations of the solar corona, we are attempting to realize precision Wolter mirrors with sub-arcsecond resolution by adopting advanced surface polish and metrology methods to sector mirrors which consist of a portion of an entire annulus, by direct polishing onto the mirror substrate. Based on the knowledge obtained through fabrication of the first (in 2013) and second (in 2014) engineering Wolter mirrors and subsequent evaluations on their X-ray focusing performance, the third engineering mirror was made in 2015−2016. The primary target of improvement over the second mirror was to suppress figure error amplitude especially for spatial frequencies around 1 mm^-1 and to suppress the large astigmatism that was present in the second mirror, by introducing improved deterministic polish and smoothing on the precision mirror surfaces (32.5 mm × 10 mm in area for both parabola and hyperbola segments), as well as by careful characterization of the systematic error in the figure measurement system for the precision polish. Measurements on the focusing performance of thus-fabricated third Wolter mirror at SPring-8 synchrotron facility with 8 keV X-rays demonstrated that the mirror attained sub-arcsecond focusing performance with its HPD (half-power diameter) size reaching as small as ~0.2 arcsec for meridional focusing while ~0.1 arcsec for sagittal focusing. The meridional focusing achieved nearly diffraction limited performance (~0.12 arcsec FWHM for the PSF core). We also confirmed that the large astigmatism noted in the second mirror was correctly removed in the third mirror with the correction of the above-mentioned systematic error.

Proceedings Article | 2 November 2016 Presentation

Progress in precision Wolter mirrors for soft x-ray observations of the sun (Conference Presentation)

Taro Sakao, Satoshi Matsuyama, Takumi Goto, Kazuto Yamauchi, Yoshiki Kohmura, Yoshinori Suematsu, Noriyuki Narukage

Proceedings Volume 9963, 99630L (2016) https://doi.org/10.1117/12.2237459

KEYWORDS: Mirrors, X-rays, X-ray imaging, Sun, Polishing, Coronagraphy, Image resolution, Solar processes, Point spread functions, X-ray astronomy

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Proceedings Article | 27 October 2016 Presentation + Paper

Size-changeable x-ray beam collimation using an adaptive x-ray optical system based on four deformable mirrors

T. Goto, S. Matsuyama, H. Nakamori, H. Hayashi, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 9965, 996502 (2016) https://doi.org/10.1117/12.2238794

KEYWORDS: Mirrors, X-rays, Deformable mirrors, Beam shaping, X-ray optics, Collimation, Optical testing, Actuators, Electrodes, X-ray technology

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Proceedings Article | 17 September 2015 Paper

Development of achromatic full-field hard x-ray microscopy with two monolithic imaging mirrors

S. Matsuyama, H. Kino, S. Yasuda, Y. Kohmura, H. Okada, T. Ishikawa, K. Yamauchi

Proceedings Volume 9592, 959208 (2015) https://doi.org/10.1117/12.2188583

KEYWORDS: Mirrors, X-rays, X-ray imaging, Microscopes, Imaging systems, Hard x-rays, Cameras, Stars, X-ray microscopy, Spatial resolution

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Proceedings Article | 4 September 2015 Paper

Development of precision Wolter mirrors for future solar x-ray observations

Taro Sakao, Satoshi Matsuyama, Ayumi Kime, Takumi Goto, Akihiko Nishihara, Hiroki Nakamori, Kazuto Yamauchi, Yoshiki Kohmura, Akira Miyake, Hirokazu Hashizume, Tadakazu Maezawa, Yoshinori Suematsu, Noriyuki Narukage

Proceedings Volume 9603, 96030U (2015) https://doi.org/10.1117/12.2188905

KEYWORDS: Mirrors, X-rays, Polishing, Coronagraphy, X-ray imaging, Sun, Surface finishing, Point spread functions, Scattering, Solar processes

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Proceedings Article | 12 May 2015 Paper

Damage to inorganic materials illuminated by focused beam of x-ray free-electron laser radiation

Takahisa Koyama, Hirokatsu Yumoto, Kensuke Tono, Tadashi Togashi, Yuichi Inubushi, Tetsuo Katayama, Jangwoo Kim, Satoshi Matsuyama, Makina Yabashi, Kazuto Yamauchi, Haruhiko Ohashi

Proceedings Volume 9511, 951107 (2015) https://doi.org/10.1117/12.2182778

KEYWORDS: Silicon, X-rays, Silica, Mirrors, Grazing incidence, Coating, Reflectivity, Free electron lasers, X-ray lasers, Metals

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Proceedings Article | 8 October 2014 Paper

Development of split-delay x-ray optics using Si(220) crystals at SACLA

Taito Osaka, Takashi Hirano, Makina Yabashi, Yasuhisa Sano, Kensuke Tono, Yuichi Inubushi, Takahiro Sato, Kanade Ogawa, Satoshi Matsuyama, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 9210, 921009 (2014) https://doi.org/10.1117/12.2060238

KEYWORDS: Crystals, X-rays, Laser crystals, Mirrors, Beam splitters, X-ray optics, Free electron lasers, Alignment procedures, Diffraction, Crystal optics

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Proceedings Article | 3 October 2014 Paper

Development of a one-dimensional two-stage focusing system with two deformable mirrors

T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 9208, 920802 (2014) https://doi.org/10.1117/12.2061821

KEYWORDS: Mirrors, X-rays, Deformable mirrors, Electrodes, Diffraction, Wavefronts, Actuators, Photography, 3D modeling, X-ray diffraction

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Proceedings Article | 5 September 2014 Paper

Ultra-high-precision surface processing techniques for nanofocusing ellipsoidal mirrors in hard x-ray region

Hirokatsu Yumoto, Takahisa Koyama, Satoshi Matsuyama, Kazuto Yamauchi, Haruhiko Ohashi

Proceedings Volume 9206, 920605 (2014) https://doi.org/10.1117/12.2063146

KEYWORDS: Mirrors, Surface roughness, Off axis mirrors, Head, Hard x-rays, X-rays, X-ray optics, Computing systems, Reflectivity, Nanolithography

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Proceedings Article | 5 September 2014 Paper

Development of achromatic full-field hard x-ray microscopy and its application to x-ray absorption near edge structure spectromicroscopy

S. Matsuyama, Y. Emi, H. Kino, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 9207, 92070Q (2014) https://doi.org/10.1117/12.2060783

KEYWORDS: Mirrors, X-rays, Microscopes, Tungsten, X-ray microscopy, Absorption, Particles, Hard x-rays, Objectives, Spectroscopy

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Proceedings Article | 27 September 2013 Paper

Damage threshold investigation using grazing incidence irradiation by hard x-ray free electron laser

T. Koyama, H. Yumoto, K. Tono, T. Sato, T. Togashi, Y. Inubushi, T. Katayama, J. Kim, S. Matsuyama, H. Mimura, M. Yabashi, K. Yamauchi, H. Ohashi

Proceedings Volume 8848, 88480T (2013) https://doi.org/10.1117/12.2025377

KEYWORDS: Reflectivity, X-rays, Mirrors, Laser damage threshold, Free electron lasers, Hard x-rays, Coating, Grazing incidence, Rhodium, X-ray optics

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Proceedings Article | 27 September 2013 Paper

Thin crystal development and applications for hard x-ray free-electron lasers

Taito Osaka, Makina Yabashi, Yasuhisa Sano, Kensuke Tono, Yuichi Inubushi, Takahiro Sato, Kanade Ogawa, Satoshi Matsuyama, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 8848, 884804 (2013) https://doi.org/10.1117/12.2023465

KEYWORDS: Crystals, Laser crystals, Silicon, Beam splitters, X-rays, Helium, Hard x-rays, Atmospheric plasma, Free electron lasers, Diffraction

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Proceedings Article | 27 September 2013 Paper

Damage characteristics of platinum/carbon multilayers under x-ray free-electron laser irradiation

Jangwoo Kim, Takahisa Koyama, Hirokatsu Yumoto, Ayaka Nagahira, Satoshi Matsuyama, Yasuhisa Sano, Makina Yabashi, Haruhiko Ohashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 8848, 88480S (2013) https://doi.org/10.1117/12.2022735

KEYWORDS: Multilayers, X-rays, Reflectivity, Platinum, Grazing incidence, Free electron lasers, Transmission electron microscopy, X-ray optics, Carbon, X-ray lasers

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Proceedings Article | 26 September 2013 Paper

Development of achromatic full-field x-ray microscopy with compact imaging mirror system

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8851, 885107 (2013) https://doi.org/10.1117/12.2023152

KEYWORDS: Mirrors, X-rays, Imaging systems, X-ray optics, X-ray imaging, Microscopes, Point spread functions, Cameras, X-ray microscopy, Spatial resolution

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Proceedings Article | 15 October 2012 Paper

Development of piezoelectric adaptive mirror for hard x-ray nanofocusing

S. Matsuyama, T. Kimura, H. Nakamori, S. Imai, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8503, 850303 (2012) https://doi.org/10.1117/12.930276

KEYWORDS: Mirrors, Deformable mirrors, X-rays, Phase retrieval, Hard x-rays, Actuators, X-ray optics, Electrodes, Wavefronts, Beam shaping

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Proceedings Article | 28 September 2011 Paper

Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy

S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8139, 813905 (2011) https://doi.org/10.1117/12.892987

KEYWORDS: Mirrors, X-rays, X-ray microscopy, Microscopes, Spatial resolution, Point spread functions, X-ray imaging, Imaging systems, X-ray optics, Microscopy

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Proceedings Article | 24 September 2010 Paper

An adaptive optical system for sub-10nm hard x-ray focusing

H. Mimura, T. Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, K. Tamasaku, Y. Koumura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 7803, 780304 (2010) https://doi.org/10.1117/12.862291

KEYWORDS: Mirrors, Hard x-rays, X-rays, Wavefronts, X-ray optics, Optical fiber cables, Optical alignment, Phase measurement, Adaptive optics, Control systems

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Proceedings Article | 27 August 2010 Paper

Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror

S. Matsuyama, T. Wakioka, H. Mimura, T. Kimura, N. Kidani, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 7802, 780202 (2010) https://doi.org/10.1117/12.860405

KEYWORDS: Mirrors, X-rays, Satellites, Spatial frequencies, Imaging systems, Microscopes, X-ray microscopy, Image resolution, Spatial resolution, Hard x-rays

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Proceedings Article | 30 April 2009 Paper

Requirements on hard x-ray grazing incidence optics for European XFEL: analysis and simulation of wavefront transformations

Liubov Samoylova, Harald Sinn, Frank Siewert, Hidekazu Mimura, Kazuto Yamauchi, Thomas Tschentscher

Proceedings Volume 7360, 73600E (2009) https://doi.org/10.1117/12.822251

KEYWORDS: Mirrors, Wavefronts, X-ray optics, Wave propagation, Optical components, Free electron lasers, Hard x-rays, Reflection, X-rays, Grazing incidence

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Proceedings Article | 3 September 2008 Paper

Development of adaptive mirror for wavefront correction of hard x-ray nanobeam

Takashi Kimura, Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Daisuke Yamakawa, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 7077, 707709 (2008) https://doi.org/10.1117/12.796029

KEYWORDS: Mirrors, X-rays, Wavefronts, Ceramics, Hard x-rays, Silicon, Fizeau interferometers, X-ray optics, Optical simulations, Optical components

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Proceedings Article | 3 September 2008 Paper

Fabrication of a 400-mm-long mirror for focusing x-ray free-electron lasers to sub-100 nm

Hidekazu Mimura, Shinya Morita, Takashi Kimura, Daisuke Yamakawa, Weimin Lin, Yoshihiro Uehara, Hirokatsu Yumoto, Satoshi Matsuyama, Yoshinori Nishino, Kenji Tamasaku, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Hitoshi Ohmori, Kazuto Yamauchi

Proceedings Volume 7077, 70770R (2008) https://doi.org/10.1117/12.795643

KEYWORDS: Mirrors, X-rays, Photography, X-ray lasers, Free electron lasers, X-ray technology, Hard x-rays, Particles, Stitching interferometry, Synchrotron technology

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Proceedings Article | 3 September 2008 Paper

Aberrations in curved x-ray multilayers

Ch. Morawe, J.-P. Guigay, V. Mocella, C. Ferrero, H. Mimura, S. Handa, K. Yamauchi

Proceedings Volume 7077, 70770T (2008) https://doi.org/10.1117/12.794534

KEYWORDS: Mirrors, Optical components, Interfaces, X-rays, X-ray optics, Diffraction, Monochromators, Ray tracing, Reflection, Refraction

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Proceedings Article | 1 October 2007 Paper

Microstitching interferometer and relative angle determinable stitching interferometer for half-meter-long x-ray mirror

Haruhiko Ohashi, Takashi Tsumura, Hiromi Okada, Hidekazu Mimura, Tatsuhiko Masunaga, Yasunori Senba, Shunji Goto, Kazuto Yamauchi, Tetsuya Ishikawa

Proceedings Volume 6704, 670405 (2007) https://doi.org/10.1117/12.733476

KEYWORDS: Mirrors, Multispectral imaging, Interferometers, X-rays, Fizeau interferometers, Actuators, Synchrotron radiation, Head, Photography, Neodymium

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Proceedings Article | 1 October 2007 Paper

Hard x-ray wavefront measurement and control for hard x-ray nanofocusing

Soichiro Handa, Hidekazu Mimura, Satoshi Matsuyama, Hirokatsu Yumoto, Takashi Kimura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6704, 670404 (2007) https://doi.org/10.1117/12.733749

KEYWORDS: Mirrors, Wavefronts, Hard x-rays, X-rays, Platinum, Metrology, Sputter deposition, Multilayers, Interferometry, Spherical lenses

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Proceedings Article | 27 September 2007 Paper

Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors

A. Rommeveaux, L. Assoufid, H. Ohashi, H. Mimura, K. Yamauchi, J. Qian, T. Ishikawa, C. Morawe, A. Macrander, A. Khounsary, S. Goto

Proceedings Volume 6704, 67040B (2007) https://doi.org/10.1117/12.736171

KEYWORDS: Mirrors, Spherical lenses, Metrology, X-rays, Error analysis, Silicon, Silicon carbide, Interferometry, Optical components, Sensors

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Proceedings Article | 20 September 2007 Paper

Reflective optics for sub-10nm hard x-ray focusing

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, T. Kimura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 6705, 67050L (2007) https://doi.org/10.1117/12.734752

KEYWORDS: Mirrors, X-rays, Multilayers, Hard x-rays, X-ray optics, Reflectivity, Reflection, Diffraction, X-ray diffraction, Optical design

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Proceedings Article | 29 August 2006 Paper

Wave-optical simulations for designing and evaluating hard x-ray reflective optics

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, A. Shibatani, K. Katagishi, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Proceedings Volume 6317, 631718 (2006) https://doi.org/10.1117/12.681944

KEYWORDS: Mirrors, X-ray optics, X-rays, Hard x-rays, Reflectivity, Satellites, X-ray sources, Geometrical optics, Optical simulations, Beam shaping

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Proceedings Article | 29 August 2006 Paper

At-wavelength figure metrology of total reflection mirrors in hard x-ray region

Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Akihiko Shibatani, Keiko Katagishi, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6317, 631709 (2006) https://doi.org/10.1117/12.681587

KEYWORDS: Mirrors, Metrology, X-rays, Hard x-rays, Optical design, Phase retrieval, Diffraction, Reflection, Multilayers, Photovoltaics

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Proceedings Article | 29 August 2006 Paper

Surface gradient integrated profiler for x-ray and EUV optics: 3D mapping of 1m-long flat mirror and off-axis parabolic mirror

Y. Higashi, Y. Takaie, K. Endo, T. Kume, K. Enami, K. Yamauchi, K. Yamamura, H. Sano, J. Uchikoshi, K. Ueno, Y. Mori

Proceedings Volume 6317, 63170B (2006) https://doi.org/10.1117/12.680245

KEYWORDS: Mirrors, Off axis mirrors, 3D metrology, Spherical lenses, Wavefronts, Photography, Phase shifts, X-ray optics, X-rays, Reflectivity

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Proceedings Article | 29 August 2006 Paper

High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors

Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6317, 631719 (2006) https://doi.org/10.1117/12.681964

KEYWORDS: Mirrors, X-rays, X-ray fluorescence spectroscopy, Microscopes, Spatial resolution, Visualization, Gallium, Gold, Hard x-rays, Light sources

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Proceedings Article | 17 September 2005 Paper

Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

Lahsen Assoufid, Amparo Rommeveaux, Haruhiko Ohashi, Kazuto Yamauchi, Hidekazu Mimura, Jun Qian, Olivier Hignette, Tetsuya Ishikawa, Christian Morawe, Albert Macrander, Ali Khounsary, Shunji Goto

Proceedings Volume 5921, 59210J (2005) https://doi.org/10.1117/12.623209

KEYWORDS: Mirrors, Silicon, Metrology, Data conversion, Error analysis, Sensors, X-rays, Fourier transforms, Optical metrology, Synchrotron radiation

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Proceedings Article | 17 September 2005 Paper

Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror fabrication

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Endo, Y. Mori, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Proceedings Volume 5921, 59210M (2005) https://doi.org/10.1117/12.623103

KEYWORDS: Mirrors, Spatial resolution, X-rays, Particles, Multispectral imaging, Head, Hard x-rays, Interferometry, Computing systems, X-ray imaging

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Proceedings Article | 15 September 2005 Paper

A new designed ultra-high precision profiler

Y. Higashi, Y. Takaie, K. Endo, T. Kume, K. Enami, K. Yamauchi, K. Yamamura, H. Sano, K. Ueno, Y. Mori

Proceedings Volume 5921, 592107 (2005) https://doi.org/10.1117/12.617986

KEYWORDS: Mirrors, Sensors, X-rays, Interferometry, Aspheric lenses, Hard x-rays, Interferometers, Humidity, X-ray optics, EUV optics

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Proceedings Article | 31 August 2005 Paper

Hard x-ray nano-focusing at 40nm level using K-B mirror optics for nanoscopy/spectroscopy

Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5918, 591804 (2005) https://doi.org/10.1117/12.623035

KEYWORDS: Mirrors, X-rays, Tolerancing, Diffraction, Hard x-rays, X-ray optics, Microscopes, Spatial resolution, Autocollimators, X-ray microscopy

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Proceedings Article | 18 October 2004 Paper

Microstitching interferometry for nanofocusing mirror optics

Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Kazuya Yamamura, Yasuhisa Sano, Kazumasa Ueno, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567511

KEYWORDS: Mirrors, Interferometers, Interferometry, Fizeau interferometers, X-rays, Hard x-rays, Fringe analysis, Superposition, Stitching interferometry, Spatial resolution

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Proceedings Article | 18 October 2004 Paper

Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement

Satoshi Matsuyama, Hidekazu Mimura, Kazuya Yamamura, Hirokatsu Yumoto, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567515

KEYWORDS: Mirrors, X-rays, Hard x-rays, X-ray optics, Optical alignment, X-ray microscopy, Optical simulations, Geometrical optics, Actuators, Mirror pointing

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Proceedings Article | 18 October 2004 Paper

Fabrication technology of ultraprecise mirror optics to realize hard x-ray nanobeam

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Satoshi Matsuyama, Hirokatsu Yumoto, Kazumasa Ueno, Masafumi Shibahara, Katsuyoshi Endo, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Yuzo Mori

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567501

KEYWORDS: Mirrors, Hard x-rays, X-rays, Electrodes, Head, Plasma, X-ray optics, Manufacturing, Metrology, Platinum

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Proceedings Article | 13 January 2004 Paper

Development of a figure correction method having spatial resolution close to 0.1 mm

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.520825

KEYWORDS: Mirrors, X-rays, X-ray imaging, Spatial resolution, X-ray technology, Optical simulations, Multispectral imaging, Particles, Interferometers, Surface finishing

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Proceedings Article | 13 January 2004 Paper

Fabrication technology of hard x-ray aspherical mirror optics and application to nanospectroscopy

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Mari Shimura, Yukihito Ishizaka

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.515127

KEYWORDS: Mirrors, X-rays, X-ray fluorescence spectroscopy, Plasma, Electrodes, X-ray optics, Beam shaping, X-ray technology, Chemical reactions, Hard x-rays

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Proceedings Article | 24 December 2002 Paper

Aspheric surface fabrication in nanometer-level accuracy by numerically controlled plasma chemical vaporization machining (CVM) and elastic emission machining (EEM)

Kazuya Yamamura, Hidekazu Mimura, Kazuto Yamauchi, Yasuhisa Sano, Akira Saito, Takehiko Kinoshita, Katsuyoshi Endo, Yuzo Mori, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.453749

KEYWORDS: Electrodes, Mirrors, Plasma, X-rays, Atmospheric plasma, Reflection, Aspheric lenses, Manufacturing, Crystals, Silicon

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Proceedings Article | 24 December 2002 Paper

Wave-optical analysis of submicron focusing of hard x-ray beams by reflective optics

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Masahiko Kanaoka, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Yuzo Mori

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.453752

KEYWORDS: Mirrors, X-rays, X-ray optics, Satellites, X-ray microscopy, Hard x-rays, Microscopy, Reflectivity, Wavefronts, Chromatic aberrations

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Proceedings Article | 24 December 2002 Paper

Submicron focusing of hard x-ray beam by elliptically figured mirrors for scanning x-ray microscopy

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Kazumasa Ueno, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.453754

KEYWORDS: Mirrors, X-rays, Manufacturing, Hard x-rays, Plasma, Crystals, Gold, X-ray microscopy, Optics manufacturing, Stitching interferometry

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Showing 5 of 62 publications

Proceedings Volume Editor (5)

SPIE Conference Volume | 11 January 2017

Adaptive X-Ray Optics IV

SPIE Conference Volume | 14 November 2016

8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics

SPIE Conference Volume | 14 October 2014

Adaptive X-Ray Optics III

SPIE Conference Volume | 26 September 2012

Adaptive X-Ray Optics II

SPIE Conference Volume | 23 August 2010

Adaptive X-Ray Optics

Conference Committee Involvement (48)

Advances in X-Ray/EUV Optics and Components XX

3 August 2025 | San Diego, California, United States

X-Ray Nanoimaging: Instruments and Methods VII

3 August 2025 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics XI

3 August 2025 | San Diego, California, United States

Optical Manufacturing and Testing 2024

20 August 2024 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XIX

19 August 2024 | San Diego, California, United States

International Conference on X-ray Optics and Applications 2024 (XOPT 2024)

22 April 2024 | Yokohama, Japan

X-Ray Nanoimaging: Instruments and Methods VI

23 August 2023 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics X

23 August 2023 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XVIII

22 August 2023 | San Diego, California, United States

Optical Manufacturing and Testing XIV

22 August 2022 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XVII

22 August 2022 | San Diego, California, United States

X-Ray Nanoimaging: Instruments and Methods V

2 August 2021 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XVI

2 August 2021 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XV

26 August 2020 | Online Only, California, United States

Advances in Metrology for X-Ray and EUV Optics IX

24 August 2020 | Online Only, California, United States

Optical Manufacturing and Testing XIII

24 August 2020 | Online Only, California, United States

Advances in X-Ray/EUV Optics and Components XIV

14 August 2019 | San Diego, California, United States

X-Ray Nanoimaging: Instruments and Methods IV

11 August 2019 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VIII

11 August 2019 | San Diego, California, United States

Adaptive X-Ray Optics V

21 August 2018 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XIII

20 August 2018 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XII

8 August 2017 | San Diego, California, United States

X-Ray Nanoimaging: Instruments and Methods III

7 August 2017 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VII

6 August 2017 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XI

31 August 2016 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VI

29 August 2016 | San Diego, California, United States

Adaptive X-Ray Optics IV

28 August 2016 | San Diego, California, United States

Sub-nanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics

26 April 2016 | Suzhou, China

X-Ray Nanoimaging: Instruments and Methods II

12 August 2015 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components X

11 August 2015 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components IX

19 August 2014 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics V

18 August 2014 | San Diego, California, United States

Adaptive X-Ray Optics III

17 August 2014 | San Diego, California, United States

X-Ray Nanoimaging: Instruments and Methods

28 August 2013 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components VIII

26 August 2013 | San Diego, California, United States

Adaptive X-Ray Optics II

14 August 2012 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components VII

13 August 2012 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics IV

12 August 2012 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components VI

22 August 2011 | San Diego, California, United States

Adaptive X-Ray Optics

3 August 2010 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components V

2 August 2010 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics III

1 August 2010 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components IV

3 August 2009 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components III

11 August 2008 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics II

30 August 2007 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components II

27 August 2007 | San Diego, California, United States

Advances in X-Ray/EUV Optics, Components, and Applications

14 August 2006 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics

2 August 2005 | San Diego, California, United States

Showing 5 of 48 Conference Committees

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