Richard Housley
at Micron Technology Inc
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 10 April 2024 Presentation + Paper
Nikhil Aditya Kumar Roy, Richard Housley, Dan Engelhard, Hao Wang, Cassie Bayless, Chris Nguyen, Franz Zach, Shubham Badjate, Abhishek Gottipati, Yoav Grauer, Oren Ben-Nun, Roie Volkovich
Proceedings Volume 12955, 129551Q (2024) https://doi.org/10.1117/12.3010036
KEYWORDS: Wafer bonding, Overlay metrology, Semiconducting wafers, Process control, Metrology, 3D metrology, Optical parametric oscillators, Advanced process control, 3D acquisition, Distortion

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129551V (2024) https://doi.org/10.1117/12.3009769
KEYWORDS: Overlay metrology, Semiconducting wafers, Light sources and illumination, Metrology, Imaging metrology

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11611, 1161133 (2021) https://doi.org/10.1117/12.2583831
KEYWORDS: Metrology, Optical parametric oscillators, Overlay metrology, Imaging metrology, 3D metrology, 3D acquisition

Proceedings Article | 22 February 2021 Presentation + Paper
Masazumi Matsunobu, Toshiharu Nishiyama, Michio Inoue, Richard Housley, Cornel Bozdog, Justin Lim, Brian Watson, Jason Reece, Steve McCandless, Olger Zwier, Maurits van der Schaar, Murat Bozkurt, Masudur al Arif, Elliott McNamara, Pieter Kapel, Alan Khan, Simon Strom, Paul Turner, Ping Olson, Ewoud van West
Proceedings Volume 11611, 1161126 (2021) https://doi.org/10.1117/12.2584759
KEYWORDS: Overlay metrology, Diffraction, Diffraction gratings, Semiconducting wafers

Proceedings Article | 26 March 2007 Paper
Proceedings Volume 6520, 65202D (2007) https://doi.org/10.1117/12.712368
KEYWORDS: Reticles, Resolution enhancement technologies, Image transmission, Nano opto mechanical systems, Semiconducting wafers, Image processing, 193nm lithography, Etching, Lithography, Databases

Showing 5 of 6 publications
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