Mr. Nils C. Monserud Profile

Nils C. Monserud

Metrology applications engineer/scientist at Micron Technology Inc

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Publications (2)

Proceedings Article | 27 April 2023 Poster + Presentation + Paper

OPO robustness and measurability improvement via extended wavelengths

Shlomit Katz, Nikhil Aditya Kumar Roy, Steve McCandless, Jason Reece, Nathan Gillespie, Nils Monserud, Yoav Grauer, Mark Stakely, Greg Gray, Yonglei Li, Peter Kimani, Nahee Park, Iwata Yasuhisa, Imura Koichi, Ito Kosuke, Yuqian Zhang

Proceedings Volume 12496, 1249613 (2023) https://doi.org/10.1117/12.2655161

KEYWORDS: Near infrared, Opacity, Metrology, 3D metrology, Photoresist processing, Overlay metrology, Image processing, Etching, Optical gratings

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Proceedings Article | 12 March 2014 Paper

Flash extreme ultraviolet holographic microscopy in a table top setup

Nils Monserud, Erik Malm, Przemyslaw Wachulak, Huiwen Xu, Ganesh Balakrishnan, Weilun Chao, Erik Anderson, Mario Marconi

Proceedings Volume 8949, 89490K (2014) https://doi.org/10.1117/12.2041698

KEYWORDS: Holography, Extreme ultraviolet, Holograms, Microscopy, Zone plates, Fourier transforms, Scanning electron microscopy, Spatial resolution, Temporal resolution, Oscillators

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